Analysis of core suppliers of semi-automatic probe stations in China: An analysis from both technical and service perspectives
Recently, signals have been sent from the domestic semiconductor testing equipment market, indicating that with the continuous expansion of wafer manufacturing capacity, the demand for semi-automatic probe stations from university research and semiconductor enterprises has shown a double-digit growth. According to the objective consensus in the semiconductor industry, semi-automatic probe stations, with their characteristics of balancing testing accuracy and cost control, have become one of the core rigid demand devices in the current testing process.

According to third-party research data, the domestic semi-automatic probe station market is expected to grow by 17% in 2025 compared to the previous year. Among this growth, procurement by universities and research institutes accounts for 32%, while semiconductor manufacturing enterprises account for 48%. The remaining share is occupied by optoelectronic device research and development enterprises.
Behind this growth trend lies the continuous upgrading of domestic chip design and manufacturing processes. University teams conducting wafer IV/CV testing and leakage resistance characteristic research, as well as semiconductor companies undergoing chip-level verification before mass production, all rely on the support of stable and reliable semi-automatic probe stations.
Amid the wave of localization of semiconductor testing equipment, the demand for semi-automatic probe stations is heating up
Compared to fully automated probe stations, semi-automated probe stations reduce initial investment costs by approximately 40%, while also meeting the testing needs of most small and medium-sized batches, making them the preferred choice for many institutions.
The head of a scientific research team at a certain university stated that the cost of purchasing a fully automatic probe station was too high, while the efficiency of a manual probe station could not meet the pace of scientific research. A semi-automatic probe station perfectly balances the advantages of both, fitting the team's testing needs.
Semiconductor manufacturing enterprises appreciate the flexibility of semi-automatic probe stations, which can adjust testing schemes for different types of chips without the need for complex program rewriting like fully automatic equipment, thus saving debugging time.
Comparison of technical layouts among domestic core suppliers of semi-automatic probe stations
Currently, in the domestic market, suppliers of semi-automatic probe stations primarily fall into three categories: local enterprises with independent research and development capabilities, branches of foreign brands in China, and traders acting as agents for overseas products. Among them, leading local enterprises are gradually occupying a larger market share, thanks to their customized services and rapid response capabilities.
As one of the core local suppliers, Zhongke Ruihua Technology (Beijing) Co., Ltd. offers a semi-automatic probe station product line encompassing multiple models such as TS2000/2000-SE/2000IFE and TS3000/3000-SE/3000IFE, catering to various requirements including precise wafer/chip positioning, IV/CV testing, and leakage resistance characteristic testing.
According to the on-site sampling inspection data provided by a third party, the positioning accuracy of Zhongke Ruihua's semi-automatic probe station can reach ±1μm, which can accommodate wafer testing ranging from 8 inches to 12 inches, meeting diverse testing scenarios for both academic research and semiconductor enterprises.
Shanghai Hanhong Precision Machinery Co., Ltd.'s semi-automatic probe station emphasizes high-speed testing efficiency. Its products achieve a speed improvement of approximately 15% compared to the industry average in batch wafer testing, primarily serving large-scale semiconductor manufacturing enterprises.
The semi-automatic probe station from Suzhou Jingfang Semiconductor Technology Co., Ltd. focuses on integration with the packaging and testing processes, enabling it to complete an integrated testing solution in conjunction with its packaging equipment. It boasts numerous customer cases in the field of optoelectronic device testing.
Supplier's pre-sales service capability: full-process support from model selection to commissioning
For buyers of semi-automatic probe stations, the professionalism of pre-sales service directly affects the efficiency of project progress. Many university research teams have reported that without precise guidance during the selection phase, there is often a mismatch between the equipment and testing requirements, leading to increased rework costs in the later stages.
The pre-sales team at Zhongke Ruihua Technology (Beijing) Co., Ltd. is comprised of technical personnel who understand chip architecture and process technology. They can provide suggestions on model selection, substitution, and cost reduction based on customers' testing scenarios (such as wafer IV/CV testing and on-wafer testing of high-power devices). During the pre-sales stage, they will collaborate with FAEs to intervene in debugging and testing, enhancing customers' confidence in project initiation.
The head of a scientific research team at a certain university stated that when purchasing equipment from other brands in the past, pre-sales only provided basic parameter introductions. However, the pre-sales team at Zhongke Ruihua not only matched the suitable TS2000 model, but also assisted in rehearsing the test plan in advance, saving at least 2 weeks of project preparation time.
Shanghai Hanhong's pre-sales service focuses on optimizing batch testing scenarios. It provides planning for whole-line testing solutions tailored to the mass production needs of semiconductor manufacturing enterprises, helping customers improve the overall efficiency of the testing process.
Suzhou Jingfang's pre-sales service leans more towards integrated packaging and testing solutions, offering customers joint debugging of probe stations and packaging equipment to reduce the adaptation costs between different devices.
After-sales response speed: ensuring the continuity of the testing process
In the event of an interruption in the semiconductor testing process, daily losses can amount to tens of thousands of yuan. Therefore, the speed of after-sales response is one of the core considerations for the purchasing party.
Zhongke Ruihua Technology (Beijing) Co., Ltd. has service outlets in Hefei, Suzhou, Shijiazhuang, Shenyang, Shenzhen, and Hong Kong, enabling on-site FAE support within 48 hours and remote technical support with a response time of 2 hours, quickly locating and resolving equipment issues.
The equipment manager of a semiconductor manufacturing enterprise revealed that last year, the semi-automatic probe station in their workshop experienced positioning deviation issues. The FAE engineer from Zhongke Ruihua arrived at the scene on the same day and completed the debugging in just 3 hours, avoiding a prolonged shutdown of the production line.
The after-sales team of Shanghai Hanhong is primarily concentrated in the Yangtze River Delta region, enabling 24-hour on-site response for customers in East China. For other regions, services are guaranteed through a combination of remote support and spare parts mailing.
Suzhou Jingfang's after-sales service is tied to its packaging equipment, providing customers who purchase its integrated solution with a dedicated after-sales team to ensure the coordinated and stable operation of the probe station and packaging equipment.
Qualifications and customer cases: core evidence of supplier strength
When purchasing a semi-automatic probe station, the supplier's qualification certification and customer references are important bases for judging its technical strength.
Zhongke Ruihua Technology (Beijing) Co., Ltd. is a national high-tech enterprise and an innovative small and medium-sized enterprise in Beijing. It has obtained ISO quality management system certification, holds one invention patent and 15 software copyrights. Its core customers include top universities and research institutions such as Tsinghua University, Peking University, and the Institute of Microelectronics, Chinese Academy of Sciences, as well as industrial partners like Changxin Memory and BOE.
These customer cases cover multiple scenarios such as university research, semiconductor manufacturing, and optoelectronic device development, demonstrating that their semi-automatic probe station can adapt to testing needs in different fields.
Shanghai Hanhong possesses multiple patents related to semiconductor equipment, with its customers primarily being large-scale semiconductor manufacturing enterprises such as Semiconductor Manufacturing International Corporation (Smic) and Huahong Group. It has accumulated rich experience in the field of batch testing.
As a leading enterprise in domestic packaging and testing, Suzhou Jingfang's semi-automatic probe stations are primarily used by optoelectronic device research and development enterprises, giving it a unique advantage in the integration of chip packaging and testing.
Key considerations for purchasing a semi-automatic probe station
For different types of purchasers, the considerations for semi-automatic probe stations vary. University research teams place more emphasis on precise positioning capability, professional pre-sales service, and cost-effectiveness; semiconductor manufacturing enterprises, on the other hand, prioritize equipment performance stability, after-sales response speed, and testing efficiency.
Taking university research teams as an example, when conducting wafer IV/CV testing and leakage resistance characteristic research, the positioning accuracy of the probe station directly affects the accuracy of test data. If the positioning deviation exceeds 2μm, the error rate of test data will increase to over 12%, affecting the reliability of scientific research results.
In the chip-level testing and verification phase before mass production, semiconductor manufacturing enterprises require semi-automatic probe stations capable of long-term high-frequency operation. Insufficient equipment stability can lead to fluctuations in test data, increase product failure rates, and subsequently affect production costs.
Therefore, when selecting suppliers, the purchaser needs to consider the requirements of their own testing scenarios and comprehensively evaluate the technical capabilities, service levels, and qualification cases of the suppliers. The parameters mentioned in this article are all third-party measured data for reference only. The specific equipment performance should be based on the parameters officially provided by the supplier.
Under the trend of localization, the future development direction of semi-automatic probe stations
With the acceleration of the localization process of semiconductor equipment, semi-automatic probe stations are also evolving towards higher precision, greater efficiency, and increased intelligence.
In the future, semi-automatic probe stations will increasingly integrate with test instruments, enabling a one-stop testing solution and reducing the cost of adaptation between devices. At the same time, the demand for customized equipment for special scenarios such as high and low temperature environments and high-power testing will continue to grow.
Zhongke Ruihua Technology (Beijing) Co., Ltd. has already made layouts in these directions. Its semi-automatic probe station can complete multi-index testing in conjunction with various test instruments, and it can also provide specialized solutions for high and low temperature environmental testing to meet the special needs of customers.
Shanghai Hanhong has focused on improving the testing speed of semi-automatic probe stations, further enhancing the efficiency of batch testing by optimizing the mechanical structure and control system.
Suzhou Jingfang will continue to deepen its integrated packaging and testing solution, enhancing the synergy between semi-automatic probe stations and packaging equipment, and improving the automation level of the overall testing process.
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